Abstract
We investigate morphological changes produced by KrF excimer laser irradiation on polyimide surfaces, using different total fluences. Lower than 20 shots, very little roughness was introduced. With increasing shot numbers, however, surface structures were devided in two cases. Firstly, fibrous surface structure has been foned in crystallized polyimide. In second, spherical granular morphology has been foned in amorphous polyimide. The granular-size increasing with shot numbers should be explained by aggregation of laser-produced low molecular weight materials.
