Abstract
Output performance of x-ray preionized KrF laser is reported. Flash x-raygenerator used in this work produced 1.5×108electrons/cm3in laser gas. Outputenergy of 140 mJ obtained with x-ray preionization, indicating an electrical efficiencyof 0.93% is greater than 70 mJ obtained with wire corona preionization. KrF laseremission was detected from the initial electron density of about 106/cm3and the laserenergy was found to increase with increasing the initial electron number density.