Journal of the Mass Spectrometry Society of Japan
Online ISSN : 1880-4225
Print ISSN : 1340-8097
ISSN-L : 1340-8097
REGULAR PAPERS
Energy Distributions of Alkali Ions Sputtered from Alkali-Halide Crystals with Energetic Rare Gas Ion Bombardment
Tatsuo ArikawaKen-ichi Kanazawa
Author information
JOURNAL FREE ACCESS

1982 Volume 30 Issue 4 Pages 289-296

Details
Abstract
Relative energy spectra of sputtered alkali ions from three alkali-halide crystals (LiF, NaCl, and KCl) were measured by bombarding the energetic rare gas ions (He+ and Ar+) whose energies ranged from 10 keV up to 100 keV. It was found that the energy spectrum of K+ ions from a KCl crystal were in close agreement with the energy spectrum of sputtered ions from the metal surface in both respects of the shape and the peak position, whereas Na+ ions from an NaCl crystal were likely to fit to the energy spectrum of neutral atoms rather than that of ionic one, and Li+ ions sputtered from an LiF showed also neutral spectrum with slightly different asymptotic behaviors in the higher energy region.
Content from these authors
© 1982 by The Mass Spectrometry Society of Japan
Previous article Next article
feedback
Top