Abstract
Applicability and prospect of TG-MS (Thermogravimetry coupled with Mass Spectrometry) was discussed by focusing to ceramic thin films and fine powders. TG-MS is applicable to clarify the formation process of the metal oxide films from the precursors which were, for example, dip-coated onto the substrate. TG-MS was discussed in comparison with the TDS (Thermal Desorption Spectroscopy) which was widely applied to the analysis of thin films. The investigation of the formation process of ceramic fine powders using TG-MS was also referred.
