Positive Ion/Molecule Reactions in Tetrafluoroethylene

Noritaka MOCHIZUKI; Akira WADA; Hiroshi OKADA; Toshiyasu ICHIKAWA; Isao YAZAWA; Daiki ASAKAWA; Kenzo HIRAOKA

doi:10.5702/massspec.53.315

NOTE

Positive Ion/Molecule Reactions in Tetrafluoroethylene

Noritaka MOCHIZUKI, Akira WADA, Hiroshi OKADA, Toshiyasu ICHIKAWA, Isao YAZAWA, Daiki ASAKAWA, Kenzo HIRAOKA

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Keywords: Ion/molecule reaction, Chemical ionization, Rate constant, Tetrafluoroethylene, Etching gas

JOURNAL FREE ACCESS

2005 Volume 53 Issue 6 Pages 315-317

DOI https://doi.org/10.5702/massspec.53.315

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Abstract

Gas-phase ion/molecule reactions in tetrafluoroethylene (C₂F₄) were studied with a pulsed electron beam mass spectrometer. When a few Torr of major gas, N₂, containing 1-10 mTorr C₂F₄ was ionized by 2 keV electrons, CF₃⁺ and C₂F₄⁺ were formed as major ions. CF₃⁺ reacted with C₂F₄ rapidly to form C₃F₇⁺. The rate constant of reaction C₂F₄⁺+C₂F₄→C₃F₅⁺+CF₃ was measured to be (1.5±0.5)×10^-11 cm³/molecule·s and found to be temperature-independent in the range of 180-310 K.

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