Abstract
This paper describes the design and the construction of power supply for the ion source of mass spectrometer in Electrotechnical Laboratory. The power supply consists of following four parts: d. c. high voltage source for ion focusing and acceleration(0.3-10KV), stabilizing and accelerating circuits for bombarding electron(0-150V), controlling and measuring system ion source temperature(150'C-300T), and exciting supply for ion source magnet(0-2A). Several special designs are adopted for above four parts so as to keep the stabilities of the order of 10-4?10-5which is enough for the ion source of mass spectrometer. Tests on these supplies showed that long time stability of10-4/hr and ripple voltage of20mV were obtained as for the high voltage supply over the range of1-10KV. Some results of the tests on other parts were described.
