Abstract
The ion microanalyzer(IMA)analyzes the secondary ions sputtered from the target which has been bombarded by the primary ions. In the analysis of insulating materials by an IMA, the electrostatic charge accumulated on the specimen surface interrupts the detection of the secondary ions. In this paper we report that, with the use of a low energy electron gun, the interruption mentioned above is prevented effectively and it is able to analyze steadily the secondary ions sputtered from insulating materials.
