Abstract
A mass spectrometer for the analysis of gas samples containing uranium hexafluoride and fluoride impurities was constructed by modification of the ionization chamber and gas inlet system of a Hitachi RMU-6L mass spectrometer. The treatment of the system by fluorine was effective to remove the impurities, reactive for uranium hexafluoride. After flushing the system by uranium hexafluoride, a liriear relationship between the UF+5 peak height and the pressure of urariium hexafluoride in the sample gas reservoir was obtained.
