Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
(c)
Structural Analysis of Patterned low-k Film by Electron Energy Loss Spectroscopy (EELS)
Yuji Otsuka, Naohiko Kawasaki, Yumiko Shimizu, Shinichi Ogawa
Author information
Keywords: low-k film, EELS, VEELS, Kramers-Kronig Analysis (KKA)
JOURNAL FREE ACCESS

2009 Volume 48 Issue 12 Pages 637

Details
Download PDF (1715K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2009 The Japan Institute of Metals and Materials
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Bulletin of the Japan Institute of Metals

Share this page
feedback
 Top