Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Atomic Diffusion Bonding with Thin Nanocrystalline Metal Films
Takehito Shimatsu, Miyuki Uomoto
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Keywords: room temperature wafer bonding, atomic diffusion coefficient, nanocrystalline metal films, surface energy, recrystallization
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2010 Volume 49 Issue 11 Pages 521-527

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