Characterization of Bending and Expansion of a Lattice of a Si Substrate Near a SiGe/Si Interface by Using Split HOLZ Line Patterns
Keywords:
convergent-beam electron diffraction,
higher-order Laue-zone reflection line,
lattice strain,
lattice bending,
lattice expansion
2012 Volume 51 Issue 8 Pages 371-378
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Article 1st page
