Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Phase Distribution of Thermoreflectance Signal Around Local Stress on Silicon Surface
Shugo Miyake
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Keywords: frequency-domain thermoreflectance method, single crystal silicon, local stress
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2018 Volume 57 Issue 12 Pages 596

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