Bulletin of the Japan Institute of Metals
Online ISSN : 1884-5835
Print ISSN : 0021-4426
ISSN-L : 0021-4426
Interaction between Dislocation Theory and Semiconductor Device Technology
Koji Sumino
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Keywords: dislocations, dislocation theory, semiconductor device technology, silicon, impurities, high temperature, solution hardening, impurity gettering, in situ observations
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1984 Volume 23 Issue 6 Pages 451-457

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