Bulletin of the Japan Institute of Metals
Online ISSN : 1884-5835
Print ISSN : 0021-4426
ISSN-L : 0021-4426
Surface Oxidization of Semiconducting Silicon
Junji Nanjo, Shigeru Nomura
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Keywords: integrated circuit, passivation, anodic oxidization, hydrogen annealing, silicon dangling bond, stoichiometric SiO2, surface density
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1985 Volume 24 Issue 9 Pages 739-745

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