Bulletin of the Japan Institute of Metals
Online ISSN : 1884-5835
Print ISSN : 0021-4426
ISSN-L : 0021-4426
Developments of Functional Material by Thin Film Coating
Akira Doi, Hiromu Kawai
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Keywords: thin film, ceramics coating, chemical, vapor deposition, physical vapor deposition, nitride, carbide, oxide
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1989 Volume 28 Issue 8 Pages 637-642

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