Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Development of Contact Materials for Semiconductor Devices
Masanori Murakami, Sigeaki Zaima
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Keywords: contact material, semiconductor, silicon, GaAs, SiC, ZnSe, diamond, interconnection material
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1994 Volume 33 Issue 6 Pages 685

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