Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Semiconductor Materials and Processing for Automotive Electronics
Masahito Mizukoshi, Osamu Takenaka, Kunihiko Hara
Author information
Keywords: automotive electronics, pressure sensor, semiconductor processing, thin film, adhesion, silicon on insulator
JOURNAL FREE ACCESS

1995 Volume 34 Issue 6 Pages 716-721

Details
Download PDF (4437K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© The Japan Institute of Metals
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Bulletin of the Japan Institute of Metals

Share this page
feedback
 Top