Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Nano-Scale Surface Processing by Gas Cluster Ion beams
Isao Yamada
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Keywords: cluster, ion beam, surface, ion implantation sputtering, thin film deposition
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1996 Volume 35 Issue 8 Pages 849-853

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