Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Analysis of Pin-Point Defect in Semiconductor Devices
Yasufumi Yabuuchi, Takashi Kouzaki, Tetsuyuki Okano
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Keywords: defect, semiconductor, rummy, foucused ion beam
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1998 Volume 37 Issue 12 Pages 995

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