Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
In-situ Observation of Focused Ion Beam Microfabrication to Semiconductors
Kazuo Furuya, Miyoko Tanaka
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Keywords: focused ion beam, microfabrication, Si, GaAs, semiconductor nano-materials
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1998 Volume 37 Issue 12 Pages 999

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