Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Development of ‘Sumiclean F’ Stainless Steel Tubing Covered with 100% Cr2O3 Film for Ultra High Purity Gas Distribution
Shigeki Azuma, Hiroshi Teranishi, Hiroshi Okamoto, Hajimu Choba, Tadahiro Ohmi
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1999 Volume 38 Issue 1 Pages 61-63

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