Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Observation of Crystal Defect in Silicon Crystal by Infrared Laser Scattering and Infrared Laser Interference
Katsuhiko Nakai, Youichi Ikematsu, Jun Takahashi, Yoshiharu Inoue
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Keywords: silicon crystal, crystal defect, void, dislocation, infrared laser scattering, infrared laser interferometer
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2002 Volume 41 Issue 12 Pages 872-873

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