Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Non-Destructive Structural Analysis and Internal Gas Pressure Estimation of Hydrogen-Irradiation-Induced Blisters on Si Surfaces
Shinsuke Nakano, Naruaki Enomoto, Shunsuke Muto, Tetsuo Tanabe
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Keywords: silicon, blister, ernal pressure
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2004 Volume 43 Issue 12 Pages 1008

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