Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
High-resolution TEM Analysis of ZrO2 Gate Dielectrics Co-doped with Y2O3Ta2O5
Takanori KiguchiNaoki WakiyaKazuo ShinozakiNobuyasu Mizutani
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2006 Volume 45 Issue 12 Pages 841

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© The Japan Institute of Metals
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