Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Analysis of (111) Nanotwin Lamellae Hillocks in Poly-silicon Thin Films Transistor
Masayuki Fujimoto, Hiroshi Koyama, Shigeki Imai
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Keywords: high-resolution transmission electron microscopy, polycrystalline silicon thin-film transistor, nanotwin, silicom oxide, hillock
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2006 Volume 45 Issue 12 Pages 849

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