Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Interface State Analysis of Contact Plug in Semiconductor Devices
Shohei Terada, Kyoichiro Asayama
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Keywords: transmission electron microscopy-electron energy loss spectroscopy (TEM-EELS), elemental mapping, spatially-resolved EELS, timeresolved acquisition technique, semiconductor
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2006 Volume 45 Issue 12 Pages 872

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