Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Analysis of Local Stress Distribution in Si Wafer by Combination Technique of CBED and FEM
Tetsuya Okuyama
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Keywords: convergent-beam electron diffraction, finite element method, local strain, local stress, Siwafer, platelet oxygen precipitate
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2006 Volume 45 Issue 12 Pages 882

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