Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
In-situ Heating Observation of Formation Process of Polycrystalline Si Using Aluminum Induced Crystallization
Kenichi Ikeda, Hideharu Nakashima, Takeshi Hirota, Kensuke Fujimoto, Youhei Sugimoto, Naoki Takata, Seiichiro Ii, Hiroshi Nakashirna
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Keywords: In-situ heating observation, aluminum induced crystallization, polycrystalline silicon
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2006 Volume 45 Issue 12 Pages 906

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