Abstract
This paper studies airflow damping of microoscillators to establish a design method for information and sensing devices that use microactuators. First, a simple and approximate formula of damping ratio is derived by using a solution of Stokes equation for a oscillating cylinder boundary condition. Then relationships between damping ratio and oscillator size are clarified by using the derived formula for silicon and iron oscillators. Finally the analytical results are compared with experimental ones to show the validity of the proposed theory.
