Abstract
We designed and fabricated a piezoelectric micro-motor which has a new structure suited for miniaturization. The prototype piezoelectric micro-motor we fabricated has 2 mm in diameter and 2 mm in height. It consists of a disk-shaped rotor, a stator with several cantilever-shape oscillators with elements made by PZT ceramies. These elerruents are integrated into the prototype piezoelectric micro-motor in a flat configuration. We can drive the motor with the resonance frequency of the oscillator, and confirmed that the prototype piezoelectric micro-motor achieved over 50 to 450 rpm at a low drive vo1tage of 4 to 20 Vpp.
