Abstract
This paper describes the way of miniaturization of a surface acoustic wave(SAW)linear motor and characteristics of the miniaturized motor. A stator transducer can be miniaturized by operation at higher frequency. The miniaturized SAW linear motor could be successfully driven at the operating frequency of 50 MHz and 70 MHz. The limit of miniaturization, namely driving frequency limit, is also discussed. It seemsthat the limit depends on the surface roughness of the stator transducer.
