Displacement Characteristics of One-piece XYZ stage with Magnifying Lever for Fine Positioning

Abstract

In the precision engineering field of fine positioning for devices such as microscopes and semi-conductor manufacturing equipments, it is very important for engineers to develop three dimensional XYZ stage with resolution less than one micrometers, having high reproducibility of motion. The authors designed and manufactured a perfect one-piece XYZ stage with about 300μ m stroke in x and y directions and 30μm in z direction, respectively, using mechanical lever magnifying small output displacement of laminar type PZT. It was stated in this paper that (1) about 30 % of magnification efficiency are confirmed experimentally and by FEM, caused mainly by deformation of elastic hinges and (2) around 10 % of mutual interferential displacement of x,y and z axis are observed, brought by the asymmetry of the mechanism due to manufacturing errors.