Abstract
We have developed the new type, very small ultrasonic micromotor, 0.95mm in diameter. This motor consists essential of metal wire as a stator and a cylindrical rotor. This metal wire is used as a waveguide to propagate ultrasonic waves from external ultrasonic oscillator to a coiled stator provided at the tip, and a cylindrical rotor in contact with this coiled stator is rotated by the ultrasonic vibration of metal wire. This motor can become easily small size as it has a simpler structure than conventional motors and required fewer parts.
