Abstract
The ability of planar Ge detector has been examined to measure soft X-ray spectra (less than about 30keV). The two Ge detectors, whose crystal sizes were 6mmφ×5mm and 10mmφ×7mm, were used. By performing the Monte Carlo simulation, the detector response functions for two detectors were numerically obtained at the energy interval of 02 keV for the incident monoenergetic photons of every 0.2 keV. No difference was found for the two detectors in the soft X-ray region. The spectra of soft X-rays transmitted through the polyvinyl chloride with various thicknesses were measured by using the two Ge detector systems. The measured spectra were corrected by using the detector response functions. The results showed that the Ge detector systems were profitable for the measurement of soft X-ray spectra.
