A Correction of Measurement for Complex Magnetic Permeability by Direct Contact Probe

Abstract

  A method for obtaining magnetic permeability of thin film by the direct contact probe was developed and the measurement error of permeability was reduced. We analyzed the frequency dependence of a current path inside the magnetic thin film using by finite element method. The magnetic permeability was corrected in consideration of the frequency dependence of the high-frequency current inside the magnetic thin film. The permeability of CoNbZr film (5 mm x 5 mm, 2 μm in thickness) was optimized by the method, and measured permeability was roughly agreed with the theoretical value up to 4 GHz.