2023 Volume 63 Issue 4 Pages 199-204
To improve the durability and adhesion of diamond-like carbon (DLC), research has been conducted on adding a graded metallic element to DLC as an intermediate layer. However, to date, no studies have evaluated the compositional characteristics of DLC films of the graded intermediate layer. Accordingly, in this study, we employ Si-doped DLC (Si-DLC) and investigate the effects of different source gas compositions. Si-DLC is deposited on austenitic stainless steel by radio-frequency plasma-enhanced chemical vapor deposition using a mixture of CH4 and Si(CH3)4 (TMS) as a source gas. Samples are subjected to cross-sectional microstructural observation, x-ray photoelectron spectroscopy, raman spectroscopy, glow discharge optical emission spectroscopy, nanoindentation, Rockwell indentation, and friction and wear tests. Results showed that the deposition rate increased with increasing TMS fraction and that sp3 and Si-C bond ratios increased. However, the hardness and wear resistance decreased with increasing TMS fraction. In addition, excellent adhesion was observed under all conditions, regardless of the TMS fraction.
