Properties and Applications of Photosensitive Films

Abstract

The features and properties of photosensitive film such as sensitivity or resolution were described in this review. As for sensitivity, the photoinitiation mechanism and method to obtain high sensitivity on Hexaaryl biimidazole which is mainly used for photosensitive film were introduced as well as the influence of matrix. The optical contribution such as absorbance or scattering and the swelling contribution of pattern in development were discussed for resolution. Moreover, the methods to improve mechanical strength of film were introduced.