Vapor Phase Growth of Zirconium Nitride Whisker on Various Substrates

Abstract

ZrN whiskers are grown on various substrates. It is found that Ni, SiO, and mullite substrates are effective in whisker density and in growth rate for the growth from a ZrCl4-H₂-N, system. The presence of Si-carrying species in a vapor phase also accelerates the nucleation of whiskers. ZrN whiskers grow at the temperature range of 1000-1300°C and in the direction of (100) and (111).