Synthesis of Ultrafine SiC Powders by Laser Driven Gas Phase Reactions

Abstract

Fine and uniform SiC(β-form) powders were synthesized by CO₂ laser driven gas phase reactions of Sill, and C₂H₄. The powders were characterized with emphasis on the compositions and particle size. The chemical composition varied with the ratio of [C₂H₄]/[SiH₄] and with reaction temperatures. The particle size was in the range of 17.0 nm to 48.5 nm, and it increased with increasing laser intensity and partial pressure of B-doped SiC powders were also synthesized.