The Surface-treatment of Aluminum Nitride Exposed to the Atmosphere and Its Surface Property

Abstract

The surface-treatment of aluminum nitride was investigated by means of X-ray photoelectron spectroscopy, X-ray diffraction method, scanning electron micrography, as well as from dispersive and pyrolytic properties. The following results were obtained: (1) The surface of aluminum nitride was composed of aluminum oxide through the oxidation of aluminum nitride by an atmospheric oxygen or water, indicating that its surface was covered by hydroxyl groups; (2) The pyrolysis curve of the surface-treated aluminum nitride showed the same trend as that of the surface-treated aluminum oxide; (3) It was concluded that the surface group was formed by alkoxyl group of the alcohol used since the vapor evolved through the pyrolysis of the surface-treated aluminum nitride was mainly composed of the olefin corresponding to the alcohol. In conclusion, the surface of aluminum nitride could effectively be treated by the same method as that for aluminum oxide.