Effect of H₂0 Plasma Treatment on the Adhesion of Metal Thin Filmst

Abstract

Poly(ethylene terephthalate) (PET) films were treated by H₂O plasma. The wettability of the PET film surface and its adhesivity to Co deposited thin films were investigated. The wettability of PET films was improved by H₂O plasma treatment, and the surface modified PET film adhered strongly to Co deposited thin films. For lower radio frequency (RF) power (25 W) during H₂O plasma treatment, the wettability of PET films was slowly improved with an increase in the treatment time, and the adhesivity to Co deposited thin films was improved remarkably at a shorter treatment time. For Higher RF power (100 W)the wettability of PET film was immediately improved, and the adhesion to Co deposited thin films was improved abruptly with treatment time. PET film showed specific magnetic characterizations.