Oxynitriding of Glass by Microwave Plasma

Abstract

Oxynitriding of phosphate glass was made by microwave plasma using nitrogen and ammonia gas. Changes of dissolution rate of Na⁺ ion into water, T_g and electric resistivity showed the same tendency as those appeared in general oxynitriding of the glasses. ESCA results showed that the increase of nitrogen contents on the treated glass surface was higher in the ammonia plasma treatment than in the nitrogen plasma treatment.