Abstract
Commercial MgO substrates were annealed in the oxygen atmosphere in order to remove impurities (H20 and/or CO2) in the surface layer. The effect of the oxygen annealing was evaluated from the degree of orientation and crystallinity. The emission spectra at about 400 nm disappeared perfectly in the specimens oxygen-annealed above 1200 ° C as examined by the measurement of cathodoluminescence. The substrates and thin films showed a minimum surface roughness when annealed in the oxygen atmosphere at 1200 ° C. The crystallinity was very high. Pt films deposited on substrates annealed at 1200 &Deg; C exhibited a good [100]-orientation from the measurement of half-width for X-ray rocking curves, TEM images and electron diffraction patterns.
