Using dynamic force microscopy with piezoelectric cantilever for indentation and high-speed observation

Abstract

We investigate the indentation process of lead zirconate titanate (PZT) cantilever on a nanoscale level and attempt a high-speed observation of the process using dynamic force microscopy (DFM), taking advantage of the converse piezoelectric property of the cantilever. We confirm that the PZT cantilever has a good converse piezoelectric effect, works as an excellent actuator, and can produce an indentation on the polymer film, making it suitable for nanoscale applications. Moreover, for use as an actuator instead of a displacement sensor, the PZT cantilever was incorporated into the feedback control system in dynamic force microscopy (DFM), and could successfully be operated. We attempted a high-speed observation using DFM, and we successfully acquired the topographic image on a 1× 1µm scan area within 8.5seconds.