Recent progress in ZnO epitaxy

Abstract

Recently, ZnO has attracted increasing attention. Although ZnO has been utilized to fabricate varistors, gas sensors, and even sunscreens, recent developments in excitonic lasing at room temperature have triggered exploration of new application areas of ZnO. To date, there are many issues to be solved including the growth of high−quality layers, fabrication of heterostructures, control of mixed crystals, conductivity control, and development of device processing. There has been great progress in ZnO epitaxy, which is leading to the realization of ZnO−based devices. This article will review recent progress in ZnO epitaxy.