Development of biodevices using microfabrication techniques

Abstract

Many biodevices are developed using microfabrication techniques in the world of semiconductor industry.However, the actual operations of the techniques for the biodevices are far from those for the large scale integration (LSI), because there are many differences in material and device structural characteristics.In this paper, we introduce apparatuses for microfabrication, materials, the detection mechanisms of biosensors, the immobilization method of biomaterials, the microchannel fabrication method and the glass bonding method by addressing the beginners in this field.Catecholamine and volatile organic compounds sensors are also introduced as examples.