Prospects and challenges of Ge device technology

Abstract

The Ge device is one of the post-Si device candidates. Historically, Ge research started earlier than Si one, but the present society is constructed of Si technology. Why is Ge required again, what are the challenges, and what is the present status? The most important issue of Ge technology is the interface control, including insulator/Ge and metal/Ge, which are very fundamental issues of semiconductor technology, but very different from those of Si. In this paper we introduce the results obtained to date in our group.