GxL spatial light modulator for Laser Dream Theater, Expo 2005 Aichi, Japan

Abstract

In this paper, we present the GxL one-dimensional spatial light modulator developed for the Laser Dream Theater, Expo 2005, Aichi, Japan. The optical diffraction device was fabricated using MEMS(Micro Electro Mechanical System) technology, and the blazed ribbon structure has been introduced. By optimizing the ribbon shape, we succeeded in developing a device with a high optical efficiency of over 70%, and a high contrast ratio of over 10000:1. The reliability of the device is also discussed.