Evaluation of mechanical properties of thin-film materials using nanoindentation

Abstract

Recent developments in nanotechnology, such as the production of micro- and nano-electro-mechanical systems (MEMS and NEMS), have enabled the miniaturization of structures. However, it is also necessary to establish techniques for evaluating the mechanical properties of micro- and nanostructured materials. A nanoindenter is a tool for directly measuring the depth profile of the mechanical properties of thin-film materials. In this article, we will explain the principle of nanoindentation and the difficulty involved in the determination of contact area. Then, we will discuss the technical advantages of nanoindentation using our experimental data.