Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Tutorial
Micro/Nano electro mechanical systems
[in Japanese]
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Keywords: micro-electro-mechanical systems, MEMS, NEMS, sensor, actuator
JOURNAL FREE ACCESS

2010 Volume 79 Issue 8 Pages 726-728

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Abstract

Micro-Nano-electro-mechanical systems (MEMS or NEMS) are expected to deliver high-impact added value to next-generation semiconductor electronics. This new version of the roadmap explores the future of MEMS/NEMS sensors, actuators, and systems from both the seeds and needs viewpoints.

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© 2010 The Japan Society of Applied Physics
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